International Technology Roadmap for Semiconductors
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The 2013 chapters are linked to the 2013 tables. A ReadMe file explains how to download to your computer so the links work.

ReadME file

2013 Executive Summary

2013 Chapter Summaries

2013 ITRS Chapters

2013 Table Summaries

2013 Tables 

2013 Chapter Links

The ITRS is devised and intended for technology assessment only and is without regard to any commercial considerations pertaining to individual products or equipment.